Phillip Chapados Jr.

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Plano, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Diffraction gratings for submicron linewidth measurement
- Patent number 5,422,723
- Issue date Jun 6, 1995
- Texas Instruments Incorporated
- Ajit P. Paranjpe
- G01 - MEASURING TESTING
Information Patent Grant
Process control for submicron linewidth measurement
- Patent number 5,361,137
- Issue date Nov 1, 1994
- Texas Instruments Incorporated
- Thomas J. Aton
- G01 - MEASURING TESTING