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Phillip Ekkels
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Munchen, DE
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last 30 patents
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Patent Grant
Method for producing a microelectromechanical transducer
Patent number
9,637,379
Issue date
May 2, 2017
TDK Corporation
Marcel Giesen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Method for Producing a Microelectromechanical Transducer
Publication number
20160167960
Publication date
Jun 16, 2016
EPCOS AG
Marcel GIESEN
B81 - MICRO-STRUCTURAL TECHNOLOGY