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Phillip Geissbühler
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Melrose, MA, US
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last 30 patents
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Patent Application
SUBSTANTIALLY NON-OXIDIZING PLASMA TREATMENT DEVICES AND PROCESSES
Publication number
20130248113
Publication date
Sep 26, 2013
LAM RESEARCH CORPORATION
Phillip Geissbûhler
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Substantially Non-Oxidizing Plasma Treatment Devices and Processes
Publication number
20110136346
Publication date
Jun 9, 2011
Axcelis Technologies, Inc.
Phillip Geissbühler
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...