Phillip Kang

Person

  • Sunnyvale, CA, US

Patents Applicationslast 30 patents

  • Information Patent Application

    RATE CONTROL PROCESS FOR A PRECURSOR DELIVERY SYSTEM

    • Publication number 20080044573
    • Publication date Feb 21, 2008
    • APPLIED MATERIALS, INC.
    • Ling Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Precursor delivery system with rate control

    • Publication number 20050095859
    • Publication date May 5, 2005
    • APPLIED MATERIALS, INC.
    • Ling Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...