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Phillip R. Atkins
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San Jose, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Measurement methodology of advanced nanostructures
Patent number
11,156,548
Issue date
Oct 26, 2021
KLA-Tencor Corporation
Manh Nguyen
G05 - CONTROLLING REGULATING
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Patent Grant
Detection and measurement of dimensions of asymmetric structures
Patent number
10,732,515
Issue date
Aug 4, 2020
KLA-Tencor Corporation
Phillip R. Atkins
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Scatterometry Modeling in the Presence of Undesired Diffraction Orders
Publication number
20200232909
Publication date
Jul 23, 2020
KLA-Tencor Corporation
Phillip Atkins
G01 - MEASURING TESTING
Information
Patent Application
Measurement Methodology of Advanced Nanostructures
Publication number
20190178788
Publication date
Jun 13, 2019
KLA-Tencor Corporation
Manh Nguyen
G05 - CONTROLLING REGULATING
Information
Patent Application
Detection And Measurement Of Dimensions Of Asymmetric Structures
Publication number
20190094711
Publication date
Mar 28, 2019
KLA-Tencor Corporation
Phillip R. Atkins
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY