Phillip Spaull

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Kanagawa-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus cleaning method
- Patent number 6,925,731
- Issue date Aug 9, 2005
- Tokyo Electron Limited
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Thin film forming apparatus cleaning method
- Publication number 20050090123
- Publication date Apr 28, 2005
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and cleaning method of the same
- Publication number 20040163677
- Publication date Aug 26, 2004
- Yutaka Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing and cleaning method
- Publication number 20030034053
- Publication date Feb 20, 2003
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching method, processing apparatus and etching apparatus
- Publication number 20020011465
- Publication date Jan 31, 2002
- Hiroyuki Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment apparatus and cleaning method of the same
- Publication number 20010055738
- Publication date Dec 27, 2001
- Yutaka Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...