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ALTERNATIVE OXIDIZING AGENTS FOR COBALT CMP
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Publication number 20180016469
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Publication date Jan 18, 2018
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Cabot Microelectronics Corporation
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Steven KRAFT
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT POLISHING ACCELERATORS
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Publication number 20170260421
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Publication date Sep 14, 2017
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Cabot Microelectronics Corporation
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Steven Kraft
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF POLISHING A LOW-K SUBSTRATE
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Publication number 20170194160
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Publication date Jul 6, 2017
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Cabot Microelectronics Corporation
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Sudeep PALLIKKARA KUTTIATOOR
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT POLISHING ACCELERATORS
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Publication number 20160115353
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Publication date Apr 28, 2016
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Cabot Microelectronics Corporation
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Steven Kraft
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COBALT DISHING CONTROL AGENTS
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Publication number 20160108285
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Publication date Apr 21, 2016
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Cabot Microelectronics Corporation
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Steven Kraft
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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METAL CATIONS FOR INITIATING POLISHING
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Publication number 20110065364
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Publication date Mar 17, 2011
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Cabot Microelectronics Corporation
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Phillip W. CARTER
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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COMPOSITIONS FOR CMP OF SEMICONDUCTOR MATERIALS
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Publication number 20100314576
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Publication date Dec 16, 2010
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Cabot Microelectronics Corporation
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Francesco DE REGE THESAURO
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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OXIDATION-STABILIZED CMP COMPOSITIONS AND METHODS
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Publication number 20100200802
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Publication date Aug 12, 2010
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Cabot Microelectronics Corporation
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Steven K. GRUMBINE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CMP method for improved oxide removal rate
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Publication number 20090191710
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Publication date Jul 30, 2009
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Cabot Microelectronics Corporation
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Phillip W. CARTER
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Friction reducing aid for CMP
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Publication number 20070117497
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Publication date May 24, 2007
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Cabot Microelectronics Corporation
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Kevin J. Moeggenborg
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B24 - GRINDING POLISHING
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Metal cations for initiating polishing
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Publication number 20070068087
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Publication date Mar 29, 2007
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Cabot Microelectronics Corporation
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Phillip W. Carter
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Readily deinkable toners
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Publication number 20060196848
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Publication date Sep 7, 2006
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Phillip W. Carter
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Compositions and methods for tantalum CMP
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Publication number 20060030158
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Publication date Feb 9, 2006
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Cabot Microelectronics
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Phillip W. Carter
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CMP composition for improved oxide removal rate
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Publication number 20050279733
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Publication date Dec 22, 2005
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Cabot Microelectronics Corporation
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Phillip W. Carter
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C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...