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Phong T. Nguyen
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Vancouver, WA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer stage position calibration method and system
Patent number
7,142,314
Issue date
Nov 28, 2006
Wafertech, LLC
Phong T. Nguyen
G01 - MEASURING TESTING
Information
Patent Grant
Automatic in situ pellicle height measurement system
Patent number
6,778,285
Issue date
Aug 17, 2004
Wafertech, Inc.
Phong Nguyen
G01 - MEASURING TESTING
Information
Patent Grant
Non-intrusive pellicle height measurement system
Patent number
6,459,491
Issue date
Oct 1, 2002
Wafer Tech
Phong T. Nguyen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Non-intrusive pellicle height measurement system
Patent number
6,346,986
Issue date
Feb 12, 2002
Wafertech, Inc.
Phong T. Nguyen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Wafer stage position calibration method and system
Publication number
20050105102
Publication date
May 19, 2005
Phong T. Nguyen
G01 - MEASURING TESTING