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Singapore, SG
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last 30 patents
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Patent Grant
Selective etching of low-k dielectrics
Patent number
7,229,930
Issue date
Jun 12, 2007
Applied Materials, Inc.
Alok Jain
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Selective etching of low-k dielectrics
Publication number
20040137748
Publication date
Jul 15, 2004
APPLIED MATERIALS, INC.
Alok Jain
H01 - BASIC ELECTRIC ELEMENTS