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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for etching etch layer
Patent number
11,784,065
Issue date
Oct 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Manish Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for etching etch layer and wafer etching apparatus
Patent number
10,283,384
Issue date
May 7, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Manish Kumar Singh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ETCHING ETCH LAYER
Publication number
20230377912
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WET BENCH PROCESS WITH IN-SITU PRE-TREATMENT OPERATION
Publication number
20230369056
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER
Publication number
20190259636
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING ETCH LAYER AND WAFER ETCHING APPARATUS
Publication number
20160314994
Publication date
Oct 27, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Manish Kumar SINGH
H01 - BASIC ELECTRIC ELEMENTS