Piero Sferlazzo

Person

Marblehead, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 10,541,137
- Issue date Jan 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead apparatus for a linear batch chemical vapor deposition s...
- Patent number 9,869,021
- Issue date Jan 16, 2018
- Aventa Technologies, Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface processing of a substrate using an...
- Patent number 9,206,500
- Issue date Dec 8, 2015
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel batch chemical vapor deposition system
- Patent number 9,169,562
- Issue date Oct 27, 2015
- Singulus MOCVD GmbH I. GR.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear batch chemical vapor deposition system
- Patent number 8,986,451
- Issue date Mar 24, 2015
- Singulus MOCVD GmbH I. GR.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for inline chemical vapor deposition
- Patent number 8,865,259
- Issue date Oct 21, 2014
- Singulus MOCVD GmbH I.GR.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling apparatus for a web deposition system
- Patent number 8,225,527
- Issue date Jul 24, 2012
- Aventa Technologies LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cathodic vacuum-arc coating deposition
- Patent number 8,157,976
- Issue date Apr 17, 2012
- Veeco Instruments, Inc.
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movable injectors in rotating disc gas reactors
- Patent number 8,092,599
- Issue date Jan 10, 2012
- Veeco Instruments Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous flow deposition system
- Patent number 6,972,055
- Issue date Dec 6, 2005
- Finens Corporation
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing pallet and related substrate processing method...
- Patent number 6,821,912
- Issue date Nov 23, 2004
- NEXX Systems Packaging, LLC
- Martin P. Klein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Acousto-optic tunable filter with segmented acousto-optic interacti...
- Patent number 6,718,076
- Issue date Apr 6, 2004
- Unaxis USA, Inc.
- Kenneth J. Bures
- G02 - OPTICS
Information Patent Grant
Substrate processing pallet and related substrate processing method...
- Patent number 6,682,288
- Issue date Jan 27, 2004
- NEXX Systems Packaging, LLC
- Martin P. Klein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-scan thin film processing system
- Patent number 6,669,824
- Issue date Dec 30, 2003
- Unaxis USA, Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing pallet and related substrate processing method...
- Patent number 6,530,733
- Issue date Mar 11, 2003
- NEXX Systems Packaging, LLC
- Martin P. Klein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Differentially-pumped material processing system
- Patent number 6,495,010
- Issue date Dec 17, 2002
- Unaxis USA, Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer sputter deposition apparatus
- Patent number 6,328,858
- Issue date Dec 11, 2001
- NEXX Systems Packaging, LLC
- David Felsenthal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line sputter deposition system
- Patent number 6,217,272
- Issue date Apr 17, 2001
- Applied Science and Technology, Inc.
- David Felsenthal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20200152466
- Publication date May 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20190371608
- Publication date Dec 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN...
- Publication number 20160071708
- Publication date Mar 10, 2016
- VEECO INSTRUMENTS, INC.
- Boris L. Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR INLINE CHEMICAL VAPOR DEPOSITION
- Publication number 20140331931
- Publication date Nov 13, 2014
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATING SYSTEM FOR A ROLL-TO-ROLL DEPOSITION SYSTEM
- Publication number 20140033976
- Publication date Feb 6, 2014
- Piero Sferlazzo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHOWERHEAD APPARATUS FOR A LINEAR BATCH CHEMICAL VAPOR DEPOSITION S...
- Publication number 20130270362
- Publication date Oct 17, 2013
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WEB COOLING DEVICE FOR A VACUUM PROCESSING SYSTEM
- Publication number 20130255922
- Publication date Oct 3, 2013
- AVENTA TECHNOLOGIES, LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES
- Publication number 20130224904
- Publication date Aug 29, 2013
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARALLEL BATCH CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20120219713
- Publication date Aug 30, 2012
- AVENTA TECHNOLOGIES, LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOVABLE INJECTORS IN ROTATING DISC GAS REACTORS
- Publication number 20120070916
- Publication date Mar 22, 2012
- VEECO INSTRUMENTS INC.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES
- Publication number 20120034733
- Publication date Feb 9, 2012
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES
- Publication number 20120034734
- Publication date Feb 9, 2012
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES
- Publication number 20120031604
- Publication date Feb 9, 2012
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES
- Publication number 20120034764
- Publication date Feb 9, 2012
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING APPARATUS FOR A WEB DEPOSITION SYSTEM
- Publication number 20120006520
- Publication date Jan 12, 2012
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LINEAR BATCH CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20110293831
- Publication date Dec 1, 2011
- AVENTA SYSTEMS, LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INLINE CHEMICAL VAPOR DEPOSITION SYSTEM
- Publication number 20110262641
- Publication date Oct 27, 2011
- AVENTA SYSTEMS, LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR INLINE CHEMICAL VAPOR DEPOSITION
- Publication number 20110262628
- Publication date Oct 27, 2011
- AVENTA TECHNOLOGIES LLC
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR ULTRA-SHALLOW IMPLANTATION IN A SEMICONDUC...
- Publication number 20100330787
- Publication date Dec 30, 2010
- Piero Sferlazzo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Continuous Feed Chemical Vapor Deposition System
- Publication number 20100310769
- Publication date Dec 9, 2010
- VEECO COMPOUND SEMICONDUCTOR, INC.
- Eric Armour
- C30 - CRYSTAL GROWTH
Information Patent Application
Roll-to-Roll Chemical Vapor Deposition System
- Publication number 20100310766
- Publication date Dec 9, 2010
- VEECO COMPOUND SEMICONDUCTOR, INC.
- Eric A. Armour
- C30 - CRYSTAL GROWTH
Information Patent Application
Web Substrate Deposition System
- Publication number 20100291308
- Publication date Nov 18, 2010
- VEECO INSTRUMENTS INC.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Web Substrate Deposition System
- Publication number 20100221426
- Publication date Sep 2, 2010
- FLUENS CORPORATION
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Surface Processing of a Substrate Using an...
- Publication number 20090098306
- Publication date Apr 16, 2009
- Veeco Instruments Inc.
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Movable injectors in rotating disc gas reactors
- Publication number 20090017190
- Publication date Jan 15, 2009
- Veeco Instruments Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CATHODIC VACUUM-ARC COATING DEPOSITION
- Publication number 20080264341
- Publication date Oct 30, 2008
- Veeco Instruments Inc.
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputter deposition system and methods of use
- Publication number 20070209932
- Publication date Sep 13, 2007
- Veeco Instruments Inc.
- Piero Sferlazzo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REACTIVE SPUTTERING
- Publication number 20070151842
- Publication date Jul 5, 2007
- FLUENS CORPORATION
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Piero Sferlazzo

Person

Patents Grantslast 30 patents

Method and apparatus for non line-of-sight doping

Method and apparatus for non line-of-sight doping

Apparatus and techniques to treat substrates using directional plas...

Showerhead apparatus for a linear batch chemical vapor deposition s...

Apparatus and techniques to treat substrates using directional plas...

Method and apparatus for surface processing of a substrate using an...

Parallel batch chemical vapor deposition system

Linear batch chemical vapor deposition system

Method and system for inline chemical vapor deposition

Cooling apparatus for a web deposition system

Apparatus for cathodic vacuum-arc coating deposition

Movable injectors in rotating disc gas reactors

Continuous flow deposition system

Substrate processing pallet and related substrate processing method...

Acousto-optic tunable filter with segmented acousto-optic interacti...

Substrate processing pallet and related substrate processing method...

Dual-scan thin film processing system

Substrate processing pallet and related substrate processing method...

Differentially-pumped material processing system

Multi-layer sputter deposition apparatus

In-line sputter deposition system

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN...

METHOD AND SYSTEM FOR INLINE CHEMICAL VAPOR DEPOSITION

HEATING SYSTEM FOR A ROLL-TO-ROLL DEPOSITION SYSTEM

SHOWERHEAD APPARATUS FOR A LINEAR BATCH CHEMICAL VAPOR DEPOSITION S...

WEB COOLING DEVICE FOR A VACUUM PROCESSING SYSTEM

METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

PARALLEL BATCH CHEMICAL VAPOR DEPOSITION SYSTEM

MOVABLE INJECTORS IN ROTATING DISC GAS REACTORS

SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

COOLING APPARATUS FOR A WEB DEPOSITION SYSTEM

LINEAR BATCH CHEMICAL VAPOR DEPOSITION SYSTEM

INLINE CHEMICAL VAPOR DEPOSITION SYSTEM

METHOD AND SYSTEM FOR INLINE CHEMICAL VAPOR DEPOSITION

APPARATUS AND METHOD FOR ULTRA-SHALLOW IMPLANTATION IN A SEMICONDUC...

Continuous Feed Chemical Vapor Deposition System

Roll-to-Roll Chemical Vapor Deposition System

Web Substrate Deposition System

Web Substrate Deposition System

Method and Apparatus for Surface Processing of a Substrate Using an...

Movable injectors in rotating disc gas reactors

APPARATUS FOR CATHODIC VACUUM-ARC COATING DEPOSITION

Sputter deposition system and methods of use

APPARATUS FOR REACTIVE SPUTTERING