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Piet Vosters
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Bladel, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,879,377
Issue date
Apr 12, 2005
ASML Netherlands B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20030137643
Publication date
Jul 24, 2003
ASML NETHERLANDS B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY