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Pieter Johannes Gertrudis Meijers
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Horst, NL
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last 30 patents
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Patent Grant
Support device, lithographic apparatus and device manufacturing method
Patent number
9,977,349
Issue date
May 22, 2018
ASML Netherlands B.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Active mount, lithographic apparatus comprising such active mount a...
Patent number
8,717,532
Issue date
May 6, 2014
ASML Netherlands B.V.
Hans Butler
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
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Patent Application
SUPPORT DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160334718
Publication date
Nov 17, 2016
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Lithographic apparatus, device manufacturing method and substrate h...
Publication number
20040179183
Publication date
Sep 16, 2004
ASML NETHERLANDS B.V.
Robertus Nicodemus Jacobus Van Ballegoij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY