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Pieter Renaat Maria Hennus
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last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060119817
Publication date
Jun 8, 2006
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for positioning a substrate on a substrate table
Publication number
20050018167
Publication date
Jan 27, 2005
ASML NETHERLANDS B.V.
Pieter Renaat Maria Hennus
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection assembly, substrate handling apparatus and...
Publication number
20040218168
Publication date
Nov 4, 2004
ASML NETHERLANDS B.V.
Pieter Johannes Marius Van Groos
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY