Pieter Simon Van Dijk

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Renkum, NL

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Patents Grantslast 30 patents

Information Patent Grant
Manufacturing a MEMS element having cantilever and cavity on a subs...
- Patent number 8,097,483
- Issue date Jan 17, 2012
- EPCOS AG
- Robertus T. F. Van Schaijk
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING A MEMS ELEMENT HAVING CANTILEVER AND CAVITY ON A SUBS...
- Publication number 20100264498
- Publication date Oct 21, 2010
- EPCOS AG
- Robertus T. F. Van Schaijk
- B81 - MICRO-STRUCTURAL TECHNOLOGY