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Patents Grantslast 30 patents

  • Information Patent Grant

    Multifunctional lithography device
    • Patent number 11,868,055
    • Issue date Jan 9, 2024
    • The Institute of Optics and Electronics, the Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Intelligent correction device control system for super-resolution l...
    • Patent number 11,714,358
    • Issue date Aug 1, 2023
    • The Institute of Optics and Electronics, the Chinese Academy of Sciences
    • Xiangang Luo
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Grant

    Secondary imaging optical lithography method and apparatus
    • Patent number 11,693,320
    • Issue date Jul 4, 2023
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Method of fabricating micro-nano structure
    • Patent number 11,675,273
    • Issue date Jun 13, 2023
    • The Institute of Optics and Electronics, the Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Methods and apparatuses for coating photoresist
    • Patent number 11,061,330
    • Issue date Jul 13, 2021
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Super-resolution imaging photolithography
    • Patent number 9,958,784
    • Issue date May 1, 2018
    • THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    MULTIFUNCTIONAL LITHOGRAPHY DEVICE
    • Publication number 20230129163
    • Publication date Apr 27, 2023
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF FABRICATING MICRO-NANO STRUCTURE
    • Publication number 20230132100
    • Publication date Apr 27, 2023
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    INTELLIGENT CORRECTION DEVICE CONTROL SYSTEM FOR SUPER-RESOLUTION L...
    • Publication number 20230126995
    • Publication date Apr 27, 2023
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    ULTRA-LARGE AREA SCANNING REACTIVE ION ETCHING MACHINE AND ETCHING...
    • Publication number 20220068617
    • Publication date Mar 3, 2022
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang LUO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
    • Publication number 20210200079
    • Publication date Jul 1, 2021
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang LUO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHODS AND APPARATUSES FOR COATING PHOTORESIST
    • Publication number 20200233306
    • Publication date Jul 23, 2020
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang Luo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SECONDARY IMAGING OPTICAL LITHOGRAPHY METHOD AND APPARATUS
    • Publication number 20200150538
    • Publication date May 14, 2020
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Xiangang LUO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
    • Publication number 20160259253
    • Publication date Sep 8, 2016
    • Institute of Optics and Electronics, Chinese Academy of Sciences
    • Xiangang LUO
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY