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Hsinchu, TW
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last 30 patents
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Patent Grant
Method of fabricating shallow trench isolation
Patent number
6,248,641
Issue date
Jun 19, 2001
United Microelectronics Corp.
Lu-Min Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of fabricating a kink-effect-free shallow trench isolations
Patent number
6,150,273
Issue date
Nov 21, 2000
United Microelectronics Inc.
Lu-Min Liu
H01 - BASIC ELECTRIC ELEMENTS