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Ping Yin Shin
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Hsin-Chu, TW
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Patents Grants
last 30 patents
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Patent Grant
Dual-tank etch method for oxide thickness control
Patent number
7,405,165
Issue date
Jul 29, 2008
Taiwan Semiconductor Manufacturing Co, Ltd.
Yang Kai Fan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Dual-tank etch method for oxide thickness control
Publication number
20060099818
Publication date
May 11, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Yang Kai Fan
H01 - BASIC ELECTRIC ELEMENTS