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Wilton, CT, US
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Patents Grants
last 30 patents
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Patent Grant
End-of-life monitoring of dynamic gas lock membranes and pupil face...
Patent number
12,158,705
Issue date
Dec 3, 2024
ASML Holding N.V. & ASML Netherlands B.V.
Joseph Harry Lyons
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
Patent number
11,887,881
Issue date
Jan 30, 2024
ASML Holding N.V.
Bruce Tirri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
END-OF-LIFE MONITORING OF DYNAMIC GAS LOCK MEMBRANES AND PUPIL FACE...
Publication number
20230083834
Publication date
Mar 16, 2023
ASML Holding N.V.
Joseph Harry LYONS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
Publication number
20220216092
Publication date
Jul 7, 2022
ASML Holding N.V.
Bruce TIRRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...