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Pingshan Luan

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  • Albany, NY, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Lateral etching of silicon
    • Patent number 12,002,683
    • Issue date Jun 4, 2024
    • Tokyo Electron Limited
    • Hamed Hajibabaeinajafabadi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching techniques
    • Patent number 11,538,690
    • Issue date Dec 27, 2022
    • Tokyo Electron Limited
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching techniques
    • Patent number 11,482,423
    • Issue date Oct 25, 2022
    • Tokyo Electron Limited
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma etching techniques
    • Patent number 11,424,120
    • Issue date Aug 23, 2022
    • Tokyo Electron Limited
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SELECTIVE AND ISOTROPIC ETCH OF SILICON OVER SILICON-GERMANIUM ALLO...
    • Publication number 20230360921
    • Publication date Nov 9, 2023
    • TOKYO ELECTRON LIMITED
    • Matthew FLAUGH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Lateral Etching of Silicon
    • Publication number 20230317465
    • Publication date Oct 5, 2023
    • TOKYO ELECTRON LIMITED
    • Hamed Hajibabaeinajafabadi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCH PROCESS FOR FABRICATING HIGH ASPECT RATIO (HAR) FEATURES
    • Publication number 20230094212
    • Publication date Mar 30, 2023
    • TOKYO ELECTRON LIMITED
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma Etching Techniques
    • Publication number 20220351970
    • Publication date Nov 3, 2022
    • TOKYO ELECTRON LIMITED
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING TECHNIQUES
    • Publication number 20220254645
    • Publication date Aug 11, 2022
    • TOKYO ELECTRON LIMITED
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING TECHNIQUES
    • Publication number 20220238344
    • Publication date Jul 28, 2022
    • TOKYO ELECTRON LIMITED
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING TECHNIQUES
    • Publication number 20220238309
    • Publication date Jul 28, 2022
    • TOKYO ELECTRON LIMITED
    • Pingshan Luan
    • H01 - BASIC ELECTRIC ELEMENTS