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Piotr Czarnecki
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Leuven, BE
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last 30 patents
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Patent Grant
Method for reducing substrate charging
Patent number
8,294,976
Issue date
Oct 23, 2012
IMEC
Ingrid De Wolf
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
METHOD FOR REDUCING SUBSTRATE CHARGING
Publication number
20120279837
Publication date
Nov 8, 2012
Katholieke Universiteit Leuven
Ingrid De Wolf
B81 - MICRO-STRUCTURAL TECHNOLOGY