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Magnetron sputter source
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Patent number 6,682,637
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Issue date Jan 27, 2004
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Unaxis Balzers Limited
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Bernd Heinz
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H01 - BASIC ELECTRIC ELEMENTS
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Method of producing flat panels
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Patent number 6,679,977
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Issue date Jan 20, 2004
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Unakis Trading AG
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Walter Haag
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Magnetron sputtering source
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Patent number 6,454,920
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Issue date Sep 24, 2002
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Unaxis Trading AG
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Walter Haag
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Method of producing flat panels
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Patent number 6,284,106
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Issue date Sep 4, 2001
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Unaxis Trading AG
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Walter Haag
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Magnetron sputtering source
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Patent number 6,093,293
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Issue date Jul 25, 2000
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Balzers Hochvakuum AG
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Walter Haag
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma generating device
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Patent number 5,399,253
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Issue date Mar 21, 1995
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Balzers Aktiengesellschaft
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Pius Grunenfelder
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H01 - BASIC ELECTRIC ELEMENTS