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Patents Grants
last 30 patents
Information
Patent Grant
Chemical mechanical planarization using nano-abrasive slurry
Patent number
11,189,497
Issue date
Nov 30, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization control in semiconductor manufacturing process
Patent number
10,541,139
Issue date
Jan 21, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doped poly-silicon for PolyCMP planarity improvement
Patent number
10,068,988
Issue date
Sep 4, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
William Weilun Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface treatment in a chemical mechanical process
Patent number
9,941,109
Issue date
Apr 10, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
B24 - GRINDING POLISHING
Information
Patent Grant
Asymmetric application of pressure to a wafer during a CMP process
Patent number
9,922,837
Issue date
Mar 20, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Wen Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doped poly-silicon for polyCMP planarity improvement
Patent number
9,871,115
Issue date
Jan 16, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
William Weilun Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for semiconductor planarization
Patent number
9,721,831
Issue date
Aug 1, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...
Publication number
20240412977
Publication date
Dec 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Chien HOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Method of Forming the Same
Publication number
20230154762
Publication date
May 18, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Wei Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR REMOVING IMPURITIES DURING CHEMICAL MECHANICA...
Publication number
20220415665
Publication date
Dec 29, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Te-Chien HOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL PLANARIZATION USING NANO-ABRASIVE SLURRY
Publication number
20200365413
Publication date
Nov 19, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOPED POLY-SILICON FOR POLYCMP PLANARITY IMPROVEMENT
Publication number
20180145152
Publication date
May 24, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
William Weilun Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Surface Treatment in a Chemical Mechanical Process
Publication number
20180005840
Publication date
Jan 4, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Wen Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Doped Poly-Silicon for PolyCMP Planarity Improvement
Publication number
20180006134
Publication date
Jan 4, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
William Weilun Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Planarization Control in Semiconductor Manufacturing Process
Publication number
20170278712
Publication date
Sep 28, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Asymmetric Application of Pressure to a Wafer During a CMP Process
Publication number
20170256414
Publication date
Sep 7, 2017
Taiwan Semiconductor Manufacturing Co., LTD
Chih-Wen Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Semiconductor Planarization
Publication number
20170162432
Publication date
Jun 8, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Chin Nien
H01 - BASIC ELECTRIC ELEMENTS