Po-Yu (Smith) Cheng

Person

Tainan, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,973,302
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic package structure with reinforcement element
- Patent number 11,961,808
- Issue date Apr 16, 2024
- Advanced Semiconductor Engineering, Inc.
- Wei-Jen Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wide bandwidth transmission schemes
- Patent number 11,943,643
- Issue date Mar 26, 2024
- MediaTek Singapore Pte Ltd.
- Kai Ying Lu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Electronic device package and method of manufacturing the same
- Patent number 11,923,285
- Issue date Mar 5, 2024
- Advanced Semiconductor Engineering, Inc.
- Po-Jen Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor package and manufacturing method thereof
- Patent number 11,869,822
- Issue date Jan 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation source for lithography process
- Patent number 11,829,082
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Ying Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV light source and apparatus for lithography
- Patent number 11,832,372
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Module vessel with scrubber gutters sized to prevent overflow
- Patent number 11,815,821
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV lithography mask with a porous reflective multilayer structure
- Patent number 11,809,075
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Width adjustment of EUV radiation beam
- Patent number 11,796,917
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shock wave visualization for extreme ultraviolet plasma optimization
- Patent number 11,800,626
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Shuo Su
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,792,909
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Residual gain monitoring and reduction for EUV drive laser
- Patent number 11,737,200
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Ferroelectric MFM inductor and related circuits
- Patent number 11,728,426
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Miin-Jang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay marks for reducing effect of bottom layer asymmetry
- Patent number 11,726,413
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Chih Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV radiation generation methods and systems
- Patent number 11,723,141
- Issue date Aug 8, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of lithography process using reticle container with discharg...
- Patent number 11,703,763
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsiao-Lun Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source, EUV lithography system, and method for performing cir...
- Patent number 11,703,769
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
- Patent number 11,680,958
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- En Hao Lai
- G01 - MEASURING TESTING
Information Patent Grant
Lithography system and method
- Patent number 11,675,280
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hao-Yu Lan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aperture design and methods thereof
- Patent number 11,656,391
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Chih Hsieh
- G02 - OPTICS
Information Patent Grant
Reticle backside inspection method
- Patent number 11,657,492
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Zi-Wen Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,630,393
- Issue date Apr 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chieh Hsieh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Secure boot policy for platform security using neutral processors i...
- Patent number 11,615,190
- Issue date Mar 28, 2023
- Dell Products L.P.
- Wei G. Liu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Droplet generator and method of servicing extreme ultraviolet imagi...
- Patent number 11,617,255
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet catcher, droplet catcher system of EUV lithography apparatu...
- Patent number 11,599,030
- Issue date Mar 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Tu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Layout modification method for exposure manufacturing process
- Patent number 11,594,528
- Issue date Feb 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Wen Cho
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for aligning master oscillator power amplifier...
- Patent number 11,588,293
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of dynamic gas lock flow inlets of an intermediate focus cap
- Patent number 11,573,495
- Issue date Feb 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and apparatus for lithography in semiconductor fabrication
- Patent number 11,550,228
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Kuan Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE
- Publication number 20230402321
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsien CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV Lithography Mask With A Porous Reflective Multilayer Structure
- Publication number 20230384663
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW
- Publication number 20230384697
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Semiconductor Devices Including Backside Power Via and Methods of F...
- Publication number 20230387012
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Hsien Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Method with EM Radiation
- Publication number 20230383403
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co, LTD.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
- Publication number 20230389168
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shang-Chieh CHIEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PRE-TREATMENT APPARATUS
- Publication number 20230386828
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hsiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION
- Publication number 20230380044
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Shuo SU
- G01 - MEASURING TESTING
Information Patent Application
WIDTH ADJUSTMENT OF EUV RADIATION BEAM
- Publication number 20230367221
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20230369201
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsien Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...
- Publication number 20230369462
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hung SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FERROELECTRIC MFM INDUCTOR AND RELATED CIRCUITS
- Publication number 20230361213
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Miin-Jang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY MARKS FOR REDUCING EFFECT OF BOTTOM LAYER ASYMMETRY
- Publication number 20230359135
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Chih Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION
- Publication number 20230363074
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
- Publication number 20230324813
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor Device and Methods of Forming the Same
- Publication number 20230317469
- Publication date Oct 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bor Chiuan Hsieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE
- Publication number 20230305404
- Publication date Sep 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiao-Lun CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
- Publication number 20230296642
- Publication date Sep 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- En Hao LAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20230290704
- Publication date Sep 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Self-Aligned Interconnect Structures and Methods of Forming the Same
- Publication number 20230274977
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Hsien Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE AND PERFORMANCE OPTIMIZATION METHOD THEREOF
- Publication number 20230266813
- Publication date Aug 24, 2023
- ASUSTek COMPUTER INC.
- Po-Han Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY SYSTEM AND METHOD
- Publication number 20230266682
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hao-Yu LAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRONIC STRUCTURE
- Publication number 20230260957
- Publication date Aug 17, 2023
- Advanced Semiconductor Engineering, Inc.
- Po-Jen CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...
- Publication number 20230208092
- Publication date Jun 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Louis Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP
- Publication number 20230185200
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
- Publication number 20230152713
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Kuan WU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Isolation Layers for Reducing Leakages Between Contacts
- Publication number 20230154992
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tze-Liang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Apparatus and Method
- Publication number 20230151489
- Publication date May 18, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC PACKAGE STRUCTURE
- Publication number 20230124933
- Publication date Apr 20, 2023
- Advanced Semiconductor Engineering, Inc.
- Wei-Jen WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC PACKAGE STRUCTURE
- Publication number 20230124000
- Publication date Apr 20, 2023
- Advanced Semiconductor Engineering, Inc.
- Wei-Jen WANG
- H01 - BASIC ELECTRIC ELEMENTS

Po-Yu (Smith) Cheng

Person

Patents Grantslast 30 patents

Methods and systems for aligning master oscillator power amplifier...

Electronic package structure with reinforcement element

Wide bandwidth transmission schemes

Electronic device package and method of manufacturing the same

Semiconductor package and manufacturing method thereof

Radiation source for lithography process

EUV light source and apparatus for lithography

Module vessel with scrubber gutters sized to prevent overflow

EUV lithography mask with a porous reflective multilayer structure

Width adjustment of EUV radiation beam

Shock wave visualization for extreme ultraviolet plasma optimization

Apparatus and method for generating extreme ultraviolet radiation

Residual gain monitoring and reduction for EUV drive laser

Ferroelectric MFM inductor and related circuits

Overlay marks for reducing effect of bottom layer asymmetry

EUV radiation generation methods and systems

Method of lithography process using reticle container with discharg...

Light source, EUV lithography system, and method for performing cir...

Particle image velocimetry of extreme ultraviolet lithography systems

Lithography system and method

Aperture design and methods thereof

Reticle backside inspection method

Apparatus and method for generating extreme ultraviolet radiation

Secure boot policy for platform security using neutral processors i...

Droplet generator and method of servicing extreme ultraviolet imagi...

Droplet catcher, droplet catcher system of EUV lithography apparatu...

Layout modification method for exposure manufacturing process

Methods and systems for aligning master oscillator power amplifier...

Control of dynamic gas lock flow inlets of an intermediate focus cap

System and apparatus for lithography in semiconductor fabrication

Patents Applicationslast 30 patents

CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE

EUV Lithography Mask With A Porous Reflective Multilayer Structure

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

Semiconductor Devices Including Backside Power Via and Methods of F...

Deposition Apparatus and Method with EM Radiation

EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY

PRE-TREATMENT APPARATUS

SHOCK WAVE VISUALIZATION FOR EXTREME ULTRAVIOLET PLASMA OPTIMIZATION

WIDTH ADJUSTMENT OF EUV RADIATION BEAM

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEV...

FERROELECTRIC MFM INDUCTOR AND RELATED CIRCUITS

OVERLAY MARKS FOR REDUCING EFFECT OF BOTTOM LAYER ASYMMETRY

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...

Semiconductor Device and Methods of Forming the Same

METHOD OF LITHOGRAPHY PROCESS AND TRANSFERRING A RETICLE

PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

PACKAGE STRUCTURE AND MANUFACTURING METHOD THEREOF

Self-Aligned Interconnect Structures and Methods of Forming the Same

ELECTRONIC DEVICE AND PERFORMANCE OPTIMIZATION METHOD THEREOF

LITHOGRAPHY SYSTEM AND METHOD

ELECTRONIC STRUCTURE

METHODS AND SYSTEMS FOR ALIGNING MASTER OSCILLATOR POWER AMPLIFIER...

CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP

METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION

Isolation Layers for Reducing Leakages Between Contacts

Deposition Apparatus and Method

ELECTRONIC PACKAGE STRUCTURE

ELECTRONIC PACKAGE STRUCTURE