Prabha K. Tedrow

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Lexington, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Very low pressure chemical vapor deposition process for deposition...
- Patent number 4,957,777
- Issue date Sep 18, 1990
- Massachusetts Institute of Technology
- Vida Ilderem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low pressure chemical vapor deposition of refractory metal silicides
- Patent number 4,668,530
- Issue date May 26, 1987
- Massachusetts Institute of Technology
- L. Rafael Reif
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...