Pradeep Kumar Govil

Person

Norwalk, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Pellicle and pellicle assembly
- Patent number 12,066,758
- Issue date Aug 20, 2024
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and pellicle assembly
- Patent number 11,347,142
- Issue date May 31, 2022
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and pellicle assembly
- Patent number 10,983,431
- Issue date Apr 20, 2021
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and pellicle assembly
- Patent number 10,466,585
- Issue date Nov 5, 2019
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of using deformable mirror using piezoelectric actuators for...
- Patent number RE46099
- Issue date Aug 9, 2016
- ASML Holding N.V.
- Pradeep K. Govil
- 001 -
Information Patent Grant
Linear motor magnetic shield apparatus for lithographic systems
- Patent number 9,136,751
- Issue date Sep 15, 2015
- ASML Holding N.V.
- Kalyan Kumar Mankala
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Linear motor magnetic shield apparatus
- Patent number 9,130,443
- Issue date Sep 8, 2015
- ASML Holding N.V.
- Kalyan Kumar Mankala
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of using deformable mirror using piezoelectric actuators for...
- Patent number RE45511
- Issue date May 12, 2015
- ASML Holding N.V.
- Pradeep K. Govil
- 359 - Optical: systems and elements
Information Patent Grant
Cooling of actuator coils
- Patent number 8,982,317
- Issue date Mar 17, 2015
- ASML Holding N.V.
- Roberto B. Wiener
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method utilizing an electrooptic modulator
- Patent number 8,879,045
- Issue date Nov 4, 2014
- ASML Holding N.V.
- James G. Tsacoyeanes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method utilizing an electrooptic modulator
- Patent number 7,876,420
- Issue date Jan 25, 2011
- ASML Holding N.V.
- James G. Tsacoyeanes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spatial light modulator using an integrated circuit actuator and me...
- Patent number 7,525,718
- Issue date Apr 28, 2009
- ASML Holding N.V.
- Pradeep K. Govil
- G02 - OPTICS
Information Patent Grant
Spatial light modulator using an integrated circuit actuator
- Patent number 7,385,750
- Issue date Jun 10, 2008
- ASML Holding N.V.
- Pradeep K. Govil
- G02 - OPTICS
Information Patent Grant
Method of using deformable mirror using piezoelectric actuators for...
- Patent number 7,372,614
- Issue date May 13, 2008
- ASML Holding N.V.
- Pradeep K Govil
- G02 - OPTICS
Information Patent Grant
System and method utilizing an illumination beam adjusting system
- Patent number 7,265,815
- Issue date Sep 4, 2007
- ASML Holding N.V.
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Deformable mirror using piezoelectric actuators formed as an integr...
- Patent number 7,224,504
- Issue date May 29, 2007
- ASML Holding N.V.
- Pradeep K Govil
- G02 - OPTICS
Information Patent Grant
System and method utilizing an electrooptic modulator
- Patent number 7,142,353
- Issue date Nov 28, 2006
- ASML Holding N.V.
- James G. Tsacoyeanes
- G02 - OPTICS
Information Patent Grant
DUV scanner linewidth control by mask error factor compensation
- Patent number 6,922,230
- Issue date Jul 26, 2005
- ASML Holding N.V.
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
DUV scanner linewidth control by mask error factor compensation
- Patent number 6,573,975
- Issue date Jun 3, 2003
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Flexible piezoelectric chuck and method of using the same
- Patent number 6,556,281
- Issue date Apr 29, 2003
- ASML US, Inc.
- Pradeep Kumar Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for selective linewidth optimization during a lit...
- Patent number 6,509,952
- Issue date Jan 21, 2003
- Silicon Valley Group, Inc.
- Pradeep Kumar Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamically adjustable high resolution adjustable slit
- Patent number 6,097,474
- Issue date Aug 1, 2000
- SVG Lithography Systems, Inc.
- Andrew W. McCullough
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of controlling illumination field to reduce line width varia...
- Patent number 6,013,401
- Issue date Jan 11, 2000
- SVG Lithography Systems, Inc.
- Andrew W. McCullough
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for adjusting an illumination field based on selected reticl...
- Patent number 5,895,737
- Issue date Apr 20, 1999
- SVG Lithography Systems, Inc.
- Andrew W. McCullough
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20220252974
- Publication date Aug 11, 2022
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20210208500
- Publication date Jul 8, 2021
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20200064731
- Publication date Feb 27, 2020
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20180364561
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear Motor Magnetic Shield Apparatus
- Publication number 20130010273
- Publication date Jan 10, 2013
- ASML Holding N.V.
- Kalyan Kumar MANKALA
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Method Utilizing an Electrooptic Modulator
- Publication number 20110075236
- Publication date Mar 31, 2011
- ASML Holding N.V.
- James G. Tsacoyeanes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear Motor Magnetic Shield Apparatus
- Publication number 20100165311
- Publication date Jul 1, 2010
- ASML Holding N.V.
- Kalyan Kumar MANKALA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cooling of Actuator Coils
- Publication number 20100026974
- Publication date Feb 4, 2010
- ASML Holding N.V.
- Roberto B. Wiener
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Spatial Light Modulator Using an Integrated Circuit Actuator and Me...
- Publication number 20080231937
- Publication date Sep 25, 2008
- ASML Holding N.V.
- Pradeep K. GOVIL
- G02 - OPTICS
Information Patent Application
System and method utilizing an illumination beam adjusting system
- Publication number 20060262288
- Publication date Nov 23, 2006
- ASML Holding N.V.
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method utilizing an electrooptic modulator
- Publication number 20060164711
- Publication date Jul 27, 2006
- ASML Holding N.V.
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method utilizing an electrooptic modulator
- Publication number 20060121375
- Publication date Jun 8, 2006
- ASML Holding N.V.
- James G. Tsacoyeanes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method utilizing an electrooptic modulator
- Publication number 20060087720
- Publication date Apr 27, 2006
- ASML Holding N.V.
- James G. Tsacoyeanes
- G02 - OPTICS
Information Patent Application
Method of using deformable mirror using piezoelectric actuators for...
- Publication number 20060028703
- Publication date Feb 9, 2006
- ASML Holding N.V.
- Pradeep K. Govil
- G02 - OPTICS
Information Patent Application
Spatial light modulator using an integrated circuit actuator and me...
- Publication number 20050046921
- Publication date Mar 3, 2005
- ASML Holding N.V.
- Pradeep K. Govil
- G02 - OPTICS
Information Patent Application
Deformable mirror using piezoelectric actuators formed as an integr...
- Publication number 20050023573
- Publication date Feb 3, 2005
- ASML Holding N.V.
- Pradeep K. Govil
- G02 - OPTICS
Information Patent Application
DUV scanner linewidth control by mask error factor compensation
- Publication number 20040066496
- Publication date Apr 8, 2004
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUV scanner linewidth control by mask error factor compensation
- Publication number 20020145719
- Publication date Oct 10, 2002
- Pradeep K. Govil
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Pradeep Kumar Govil

Person

Patents Grantslast 30 patents

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Pellicle and pellicle assembly

Method of using deformable mirror using piezoelectric actuators for...

Linear motor magnetic shield apparatus for lithographic systems

Linear motor magnetic shield apparatus

Method of using deformable mirror using piezoelectric actuators for...

Cooling of actuator coils

Method utilizing an electrooptic modulator

System and method utilizing an electrooptic modulator

Spatial light modulator using an integrated circuit actuator and me...

Spatial light modulator using an integrated circuit actuator

Method of using deformable mirror using piezoelectric actuators for...

System and method utilizing an illumination beam adjusting system

Deformable mirror using piezoelectric actuators formed as an integr...

System and method utilizing an electrooptic modulator

DUV scanner linewidth control by mask error factor compensation

DUV scanner linewidth control by mask error factor compensation

Flexible piezoelectric chuck and method of using the same

Method and system for selective linewidth optimization during a lit...

Dynamically adjustable high resolution adjustable slit

Method of controlling illumination field to reduce line width varia...

Method for adjusting an illumination field based on selected reticl...

Patents Applicationslast 30 patents

PELLICLE AND PELLICLE ASSEMBLY

PELLICLE AND PELLICLE ASSEMBLY

PELLICLE AND PELLICLE ASSEMBLY

PELLICLE AND PELLICLE ASSEMBLY

Linear Motor Magnetic Shield Apparatus

Method Utilizing an Electrooptic Modulator

Linear Motor Magnetic Shield Apparatus

Cooling of Actuator Coils

Spatial Light Modulator Using an Integrated Circuit Actuator and Me...

System and method utilizing an illumination beam adjusting system

System and method utilizing an electrooptic modulator

System and method utilizing an electrooptic modulator

System and method utilizing an electrooptic modulator

Method of using deformable mirror using piezoelectric actuators for...

Spatial light modulator using an integrated circuit actuator and me...

Deformable mirror using piezoelectric actuators formed as an integr...

DUV scanner linewidth control by mask error factor compensation

DUV scanner linewidth control by mask error factor compensation