Pranav Sheth

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Parallel profile determination in optical metrology
- Patent number 7,515,283
- Issue date Apr 7, 2009
- Tokyo Electron, Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Grant
Parallel profile determination for an optical metrology system
- Patent number 7,469,192
- Issue date Dec 23, 2008
- Tokyo Electron Ltd.
- Tri Thanh Khuong
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Parallel profile determination for an optical metrology system
- Publication number 20080015812
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING
Information Patent Application
Parallel profile determination in optical metrology
- Publication number 20080013108
- Publication date Jan 17, 2008
- TOKYO ELECTRON LIMITED
- Tri Thanh Khuong
- G01 - MEASURING TESTING