Prasad N. Gadgil

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Particle reactor for atomic layer deposition (ALD) and chemical vap...
- Patent number 9,896,763
- Issue date Feb 20, 2018
- GM Global Technology Operations LLC
- Gayatri V. Dadheech
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for filling of a recessed structure of a semiconductor device
- Patent number 7,365,005
- Issue date Apr 29, 2008
- Prasad N. Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for atomic layer chemical vapor deposition
- Patent number 6,812,157
- Issue date Nov 2, 2004
- Prasad Narhar Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measurement of substrate temperature in a process chamber using non...
- Patent number 6,563,092
- Issue date May 13, 2003
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing chamber for atomic layer deposition processes
- Patent number 6,387,185
- Issue date May 14, 2002
- Genus, Inc.
- Kenneth Doering
- C30 - CRYSTAL GROWTH
Information Patent Grant
Processing chamber for atomic layer deposition processes
- Patent number 6,174,377
- Issue date Jan 16, 2001
- Genus, Inc.
- Kenneth Doering
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertically-stacked process reactor and cluster tool system for atom...
- Patent number 5,879,459
- Issue date Mar 9, 1999
- Genus, Inc.
- Prasad N. Gadgil
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
NOVEL PARTICLE REACTOR FOR ATOMIC LAYER DEPOSITION (ALD) AND CHEMIC...
- Publication number 20170327948
- Publication date Nov 16, 2017
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Gayatri V. Dadheech
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF LOW TEMPERATURE DEPOSITION OF CERAMIC THIN FILMS
- Publication number 20150329965
- Publication date Nov 19, 2015
- Prasad Narhar Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID SYNTHESIS OF POLYCRYSTALLINE SILICON SHEETS FOR PHOTO-VOLTAIC...
- Publication number 20100213643
- Publication date Aug 26, 2010
- Prasad N. Gadgil
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR LARGE AREA MULTI-LAYER ATOMIC LAYER CHEMIC...
- Publication number 20090304924
- Publication date Dec 10, 2009
- Prasad Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Collection of unused precursors in ALD
- Publication number 20050016453
- Publication date Jan 27, 2005
- Thomas E. Seidel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for plasma enhanced monolayer processing
- Publication number 20040224504
- Publication date Nov 11, 2004
- Prasad N. Gadgil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing chamber for atomic layer deposition processes
- Publication number 20010011526
- Publication date Aug 9, 2001
- Kenneth Doering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Prasad N. Gadgil

Person

Patents Grantslast 30 patents

Particle reactor for atomic layer deposition (ALD) and chemical vap...

Method for filling of a recessed structure of a semiconductor device

Apparatus for atomic layer chemical vapor deposition

Measurement of substrate temperature in a process chamber using non...

Processing chamber for atomic layer deposition processes

Processing chamber for atomic layer deposition processes

Vertically-stacked process reactor and cluster tool system for atom...

Patents Applicationslast 30 patents

NOVEL PARTICLE REACTOR FOR ATOMIC LAYER DEPOSITION (ALD) AND CHEMIC...

METHODS OF LOW TEMPERATURE DEPOSITION OF CERAMIC THIN FILMS

RAPID SYNTHESIS OF POLYCRYSTALLINE SILICON SHEETS FOR PHOTO-VOLTAIC...

APPARATUS AND METHOD FOR LARGE AREA MULTI-LAYER ATOMIC LAYER CHEMIC...

Collection of unused precursors in ALD

Apparatus and method for plasma enhanced monolayer processing

Processing chamber for atomic layer deposition processes