Prasanna Dighe

Person

San Ramon, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,682,570
- Issue date Jun 20, 2023
- KLA Corporation
- Pradeep Vukkadala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-spot analysis system with multiple optical probes
- Patent number 11,441,893
- Issue date Sep 13, 2022
- KLA Corporation
- Prasanna Dighe
- G02 - OPTICS
Information Patent Grant
Process-induced displacement characterization during semiconductor...
- Patent number 11,164,768
- Issue date Nov 2, 2021
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Grant
Removable opaque coating for accurate optical topography measuremen...
- Patent number 11,049,720
- Issue date Jun 29, 2021
- KLA Corporation
- Dieter Mueller
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 10,545,412
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Statistical overlay error prediction for feed forward and feedback...
- Patent number 9,087,176
- Issue date Jul 21, 2015
- KLA-Tencor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Computer-implemented methods for inspecting and/or classifying a wafer
- Patent number 8,269,960
- Issue date Sep 18, 2012
- KLA-Tencor Corp.
- Juergen Reich
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20220005714
- Publication date Jan 6, 2022
- KLA Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMEN...
- Publication number 20200126786
- Publication date Apr 23, 2020
- KLA Corporation
- Dieter Mueller
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multi-Spot Analysis System with Multiple Optical Probes
- Publication number 20190331592
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Prasanna Dighe
- G01 - MEASURING TESTING
Information Patent Application
Process-Induced Displacement Characterization During Semiconductor...
- Publication number 20190333794
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G05 - CONTROLLING REGULATING
Information Patent Application
Statistical Overlay Error Prediction for Feed Forward and Feedback...
- Publication number 20170017162
- Publication date Jan 19, 2017
- KLA-Tenor Corporation
- Wei Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER
- Publication number 20100060888
- Publication date Mar 11, 2010
- KLA-Tencor Corporation
- Juergen Reich
- G01 - MEASURING TESTING

Prasanna Dighe

Person

Patents Grantslast 30 patents

Process-induced displacement characterization during semiconductor...

Multi-spot analysis system with multiple optical probes

Process-induced displacement characterization during semiconductor...

Removable opaque coating for accurate optical topography measuremen...

Statistical overlay error prediction for feed forward and feedback...

Statistical overlay error prediction for feed forward and feedback...

Computer-implemented methods for inspecting and/or classifying a wafer

Patents Applicationslast 30 patents

Process-Induced Displacement Characterization During Semiconductor...

REMOVABLE OPAQUE COATING FOR ACCURATE OPTICAL TOPOGRAPHY MEASUREMEN...

Multi-Spot Analysis System with Multiple Optical Probes

Process-Induced Displacement Characterization During Semiconductor...

Statistical Overlay Error Prediction for Feed Forward and Feedback...

COMPUTER-IMPLEMENTED METHODS FOR INSPECTING AND/OR CLASSIFYING A WAFER