Prashant Gadgil

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for reducing process drift in inductive coupled plasma et...
- Patent number 6,241,845
- Issue date Jun 5, 2001
- Lam Research Corporation
- Prashant Gadgil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for reducing process drift in inductive coupled plasma et...
- Patent number 6,048,798
- Issue date Apr 11, 2000
- Lam Research Corporation
- Prashant Gadgil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for etching self-aligned contacts
- Patent number 5,783,496
- Issue date Jul 21, 1998
- Lam Research Corporation
- Janet M. Flanner
- H01 - BASIC ELECTRIC ELEMENTS