Prashanth Kothnur

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for shaping magnetic fields during semiconductor processing
- Patent number 12,203,163
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Goichi Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Virtual measurement of conditions proximate to a substrate with phy...
- Patent number 12,131,105
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Preetham Prahallada Rao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods of using a segmented showerhead for uniform delivery of mul...
- Patent number 12,043,895
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Eco-efficiency (sustainability) dashboard for semiconductor manufac...
- Patent number 12,001,197
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ala Moradian
- G05 - CONTROLLING REGULATING
Information Patent Grant
Showerhead for providing multiple materials to a process chamber
- Patent number 11,970,775
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Prashanth Kothnur
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Segmented showerhead for uniform delivery of multiple precursors
- Patent number 11,834,743
- Issue date Dec 5, 2023
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EM source for enhanced plasma control
- Patent number 11,692,262
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for reducing tungsten resistivity
- Patent number 11,655,534
- Issue date May 23, 2023
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,600,476
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming films on substrates
- Patent number 11,505,863
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition chamber showerhead
- Patent number D969980
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- D23 - Environmental heating and cooling
Information Patent Grant
Plasma density control on substrate edge
- Patent number 11,495,440
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead reflector
- Patent number D967351
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Alexander N. Lerner
- D23 - Environmental heating and cooling
Information Patent Grant
Methods and apparatus for reducing tungsten resistivity
- Patent number 11,447,857
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlling a flow process material to a d...
- Patent number 11,393,703
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Alexander Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,183,375
- Issue date Nov 23, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for producing low angle depositions
- Patent number 11,170,982
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- B08 - CLEANING
Information Patent Grant
Plasma density control on substrate edge
- Patent number 10,790,121
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Bhaskar Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron assembly for physical vapor deposition chamber
- Patent number 9,991,101
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for PVD dielectric deposition
- Patent number 9,928,997
- Issue date Mar 27, 2018
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar collimator utilized in a physical vapor deposition chamber
- Patent number 9,831,074
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Joung Joo Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputter source for semiconductor process chambers
- Patent number 9,620,339
- Issue date Apr 11, 2017
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generator systems and methods of forming plasma
- Patent number 9,591,738
- Issue date Mar 7, 2017
- Novellus Systems, Inc.
- Huatan Qiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bias voltage frequency controlled angular ion distribution in plasm...
- Patent number 9,520,267
- Issue date Dec 13, 2016
- Applied Mateirals, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...
- Publication number 20240310819
- Publication date Sep 19, 2024
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRE-CURSORS
- Publication number 20230092987
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...
- Publication number 20230078146
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Preetham Prahallada Rao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20230042777
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING
- Publication number 20220380888
- Publication date Dec 1, 2022
- Goichi YOSHIDOME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
- Publication number 20220351988
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220341025
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Wenting HOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20220341029
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...
- Publication number 20220334569
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES
- Publication number 20220245307
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Prashanth Kothnur
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY
- Publication number 20220081756
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Wenting HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition System With Multi-Cathode And Method Of Manufacture Thereof
- Publication number 20220037136
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DELIVERY METHODS AND APPARATUS
- Publication number 20210069745
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Alexander N. LERNER
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20210017639
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
- Publication number 20200381222
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES
- Publication number 20200378000
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRECURSORS
- Publication number 20200087790
- Publication date Mar 19, 2020
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PRODUCING LOW ANGLE DEPOSITIONS
- Publication number 20200051794
- Publication date Feb 13, 2020
- ANANTHA K. SUBRAMANI
- B08 - CLEANING
Information Patent Application
SHOWERHEAD FOR PROVIDING MULTIPLE MATERIALS TO A PROCESS CHAMBER
- Publication number 20200048767
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- PRASHANTH KOTHNUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...
- Publication number 20190382890
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- ALEXANDER LERNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-ZONE COLLIMATOR FOR SELECTIVE PVD
- Publication number 20190353919
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- BENCHERKI MEBARKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DENSITY CONTROL ON SUBSTRATE EDGE
- Publication number 20180294146
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Bhaskar KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTER SOURCE FOR SEMICONDUCTOR PROCESS CHAMBERS
- Publication number 20170211175
- Publication date Jul 27, 2017
- Applied Materials, Inc.
- ANANTHA K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PVD DIELECTRIC DEPOSITION
- Publication number 20160172168
- Publication date Jun 16, 2016
- Applied Materials, Inc.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20160035547
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- WILLIAM JOHANSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...
- Publication number 20150371827
- Publication date Dec 24, 2015
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF
- Publication number 20150279635
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIPOLAR COLLIMATOR UTILIZED IN A PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20150114823
- Publication date Apr 30, 2015
- Applied Materials, Inc.
- Joung Joo LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER SOURCE FOR SEMICONDUCTOR PROCESS CHAMBERS
- Publication number 20140262767
- Publication date Sep 18, 2014
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL
- Publication number 20130000848
- Publication date Jan 3, 2013
- NOVELLUS SYSTEMS INC.
- Panya Wongsenakhum
- H01 - BASIC ELECTRIC ELEMENTS

Prashanth Kothnur

Person

Patents Grantslast 30 patents

Methods for shaping magnetic fields during semiconductor processing

Virtual measurement of conditions proximate to a substrate with phy...

Methods of using a segmented showerhead for uniform delivery of mul...

Eco-efficiency (sustainability) dashboard for semiconductor manufac...

Showerhead for providing multiple materials to a process chamber

Segmented showerhead for uniform delivery of multiple precursors

EM source for enhanced plasma control

Apparatus for reducing tungsten resistivity

Deposition system with multi-cathode and method of manufacture thereof

Methods for forming films on substrates

Deposition chamber showerhead

Plasma density control on substrate edge

Showerhead reflector

Methods and apparatus for reducing tungsten resistivity

Apparatus and method for controlling a flow process material to a d...

Deposition system with multi-cathode and method of manufacture thereof

Methods and apparatus for producing low angle depositions

Plasma density control on substrate edge

Magnetron assembly for physical vapor deposition chamber

Apparatus for PVD dielectric deposition

Bipolar collimator utilized in a physical vapor deposition chamber

Sputter source for semiconductor process chambers

Plasma generator systems and methods of forming plasma

Bias voltage frequency controlled angular ion distribution in plasm...

Patents Applicationslast 30 patents

ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...

SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRE-CURSORS

VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHY...

METHODS FOR FORMING FILMS ON SUBSTRATES

METHODS FOR SHAPING MAGNETIC FIELDS DURING SEMICONDUCTOR PROCESSING

APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...

APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

EM SOURCE FOR ENHANCED PLASMA CONTROL

ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFAC...

HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES

METHODS AND APPARATUS FOR REDUCING TUNGSTEN RESITIVITY

Deposition System With Multi-Cathode And Method Of Manufacture Thereof

VAPOR DELIVERY METHODS AND APPARATUS

EM SOURCE FOR ENHANCED PLASMA CONTROL

PLASMA DENSITY CONTROL ON SUBSTRATE EDGE

METHODS AND SYSTEMS FOR FORMING FILMS ON SUBSTRATES

SEGMENTED SHOWERHEAD FOR UNIFORM DELIVERY OF MULTIPLE PRECURSORS

METHODS AND APPARATUS FOR PRODUCING LOW ANGLE DEPOSITIONS

SHOWERHEAD FOR PROVIDING MULTIPLE MATERIALS TO A PROCESS CHAMBER

APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A D...

MULTI-ZONE COLLIMATOR FOR SELECTIVE PVD

PLASMA DENSITY CONTROL ON SUBSTRATE EDGE

SPUTTER SOURCE FOR SEMICONDUCTOR PROCESS CHAMBERS

APPARATUS FOR PVD DIELECTRIC DEPOSITION

MAGNETRON ASSEMBLY FOR PHYSICAL VAPOR DEPOSITION CHAMBER

BIAS VOLTAGE FREQUENCY CONTROLLED ANGULAR ION DISTRIBUTION IN PLASM...

DEPOSITION SYSTEM WITH MULTI-CATHODE AND METHOD OF MANUFACTURE THEREOF

BIPOLAR COLLIMATOR UTILIZED IN A PHYSICAL VAPOR DEPOSITION CHAMBER

SPUTTER SOURCE FOR SEMICONDUCTOR PROCESS CHAMBERS

PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL