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Prashanth RAO
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Bangalore, IN
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last 30 patents
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Patent Grant
Thermal radiation barrier for substrate processing chamber components
Patent number
10,177,014
Issue date
Jan 8, 2019
Applied Materials, Inc.
Govinda Raj
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
LOW TEMPERATURE ELECTROSTATIC CHUCK
Publication number
20250125181
Publication date
Apr 17, 2025
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS
Publication number
20140165915
Publication date
Jun 19, 2014
Govinda RAJ
H01 - BASIC ELECTRIC ELEMENTS