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Pratheep GUNASEELAN
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Fremont, CA, US
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last 30 patents
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Patent Grant
Apparatus for generating etchants for remote plasma processes
Patent number
12,002,659
Issue date
Jun 4, 2024
Applied Materials, Inc.
Tae Seung Cho
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
APPARATUS FOR GENERATING ETCHANTS FOR REMOTE PLASMA PROCESSES
Publication number
20230402262
Publication date
Dec 14, 2023
Tae Seung CHO
H01 - BASIC ELECTRIC ELEMENTS