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Premchandra M. Shankar
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Equi-probability defect detection
Patent number
11,410,292
Issue date
Aug 9, 2022
KLA Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System and method for defining flexible regions on a sample during...
Patent number
11,127,136
Issue date
Sep 21, 2021
KLA Corporation
Yong Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Repeater defect detection
Patent number
10,957,033
Issue date
Mar 23, 2021
KLA-Tencor Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and system for detecting defects on a substrate
Patent number
10,062,156
Issue date
Aug 28, 2018
KLA-Tencor Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
System and Method for Defining Flexible Regions on a Sample During...
Publication number
20210174483
Publication date
Jun 10, 2021
KLA Corporation
Yong Zhang
G01 - MEASURING TESTING
Information
Patent Application
EQUI-PROBABILITY DEFECT DETECTION
Publication number
20210097672
Publication date
Apr 1, 2021
KLA Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Repeater Defect Detection
Publication number
20190012778
Publication date
Jan 10, 2019
KLA-Tencor Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and System for Detecting Defects on a Substrate
Publication number
20170249732
Publication date
Aug 31, 2017
KLA-Tencor Corporation
Premchandra M. Shankar
G06 - COMPUTING CALCULATING COUNTING