Priya Mukundhan

Person

Lake Hopatcong, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Characterization of patterned structures using acoustic metrology
- Patent number 11,988,641
- Issue date May 21, 2024
- Onto Innovation Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of semiconductor metrology systems
- Patent number 10,173,249
- Issue date Jan 8, 2019
- Rudolph Technologies, Inc.
- Jian Ding
- B08 - CLEANING
Information Patent Grant
Non-destructive acoustic metrology for void detection
- Patent number 9,991,176
- Issue date Jun 5, 2018
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical acoustic substrate assessment system and method
- Patent number 9,576,862
- Issue date Feb 21, 2017
- Rudolph Technologies, Inc.
- Todd Murray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Position sensitive detection optimization
- Patent number 9,140,601
- Issue date Sep 22, 2015
- Rudolph Technologies, Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Characterization with picosecond ultrasonics of metal portions of s...
- Patent number 8,312,772
- Issue date Nov 20, 2012
- Rudolph Technologies, Inc.
- Guray Tas
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
A SYSTEM AND METHOD FOR PERFORMING ALIGNMENT AND OVERLAY MEASUREMEN...
- Publication number 20240004311
- Publication date Jan 4, 2024
- ONTO INNOVATION INC.
- Manjusha Mehendale
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
- Publication number 20210318270
- Publication date Oct 14, 2021
- ONTO INNOVATION INC.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
NON-DESTRUCTIVE ACOUSTIC METROLOGY FOR VOID DETECTION
- Publication number 20170221778
- Publication date Aug 3, 2017
- The Regents of the University of Colorado
- Manjusha MEHENDALE
- G01 - MEASURING TESTING
Information Patent Application
CALIBRATION OF SEMICONDUCTOR METROLOGY SYSTEMS
- Publication number 20160101445
- Publication date Apr 14, 2016
- Rudolph Technologies, Inc.
- Jian Ding
- B08 - CLEANING
Information Patent Application
OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD
- Publication number 20160043008
- Publication date Feb 11, 2016
- Todd MURRAY
- G01 - MEASURING TESTING
Information Patent Application
POSITION SENSITIVE DETECTION OPTIMIZATION
- Publication number 20140103188
- Publication date Apr 17, 2014
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
CHARACTERIZATION WITH PICOSECOND ULTRASONICS OF METAL PORTIONS OF S...
- Publication number 20100281981
- Publication date Nov 11, 2010
- Guray Tas
- G01 - MEASURING TESTING

Priya Mukundhan

Person

Patents Grantslast 30 patents

Characterization of patterned structures using acoustic metrology

Calibration of semiconductor metrology systems

Non-destructive acoustic metrology for void detection

Optical acoustic substrate assessment system and method

Position sensitive detection optimization

Characterization with picosecond ultrasonics of metal portions of s...

Patents Applicationslast 30 patents

A SYSTEM AND METHOD FOR PERFORMING ALIGNMENT AND OVERLAY MEASUREMEN...

CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY

NON-DESTRUCTIVE ACOUSTIC METROLOGY FOR VOID DETECTION

CALIBRATION OF SEMICONDUCTOR METROLOGY SYSTEMS

OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD

POSITION SENSITIVE DETECTION OPTIMIZATION

CHARACTERIZATION WITH PICOSECOND ULTRASONICS OF METAL PORTIONS OF S...