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Patents Grantslast 30 patents

Information Patent Grant
Sub-field control of a lithographic process and associated apparatus
- Patent number 11,662,666
- Issue date May 30, 2023
- ASML Netherlands B.V.
- Rowin Meijerink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD TO PREDICT METROLOGY OFFSET OF A SEMICONDUCTOR MANUFACTURING...
- Publication number 20240094640
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Thiago DOS SANTOS GUZELLA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
- Publication number 20230288817
- Publication date Sep 14, 2023
- ASML NETHERLANDS B.V.
- Rowin MEIJERINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A SAMPLING SCHEME, A SEMICONDUCTOR SUBSTRATE...
- Publication number 20220260920
- Publication date Aug 18, 2022
- ASML NETHERLANDS B.V.
- Pieter Gerardus Jacobus SMORENBERG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
- Publication number 20220244649
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Pieter Gerardus Jacobus SMORENBERG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
- Publication number 20220171295
- Publication date Jun 2, 2022
- ASML NETHERLANDS B.V.
- Rowin MEIJERINK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY