Py-Shiun Yeh

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method for in-situ monitoring layer uniformity of sputter coating b...
- Patent number 6,493,070
- Issue date Dec 10, 2002
- Precision Instrument Development Center, National Science Council
- Cheng-Chung Jaing
- G01 - MEASURING TESTING