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Patents Grants
last 30 patents
Information
Patent Grant
Degassing chamber and semiconductor processing apparatus
Patent number
11,328,940
Issue date
May 10, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiang Jia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating chamber and semiconductor processing apparatus
Patent number
10,273,572
Issue date
Apr 30, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiang Jia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
DEGASSING METHOD, DEGASSING CHAMBER, AND SEMICONDUCTOR PROCESSING A...
Publication number
20190218660
Publication date
Jul 18, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hua YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEGASSING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20190221454
Publication date
Jul 18, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiang JIA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20170321319
Publication date
Nov 9, 2017
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiang JIA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...