Qiang Song

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Lithography pupil shaping optical system and method for generating...
- Patent number 9,323,052
- Issue date Apr 26, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ADHESIVE
- Publication number 20220033698
- Publication date Feb 3, 2022
- Dow Silicones Corporation
- Yi GUO
- F21 - LIGHTING
Information Patent Application
PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...
- Publication number 20160004074
- Publication date Jan 7, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS