Membership
Tour
Register
Log in
Qiang Zhang
Follow
Person
Fremont, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Defect inspection and review using transmissive current image of ch...
Patent number
11,410,830
Issue date
Aug 9, 2022
KLA Corporation
Hong Xiao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tilted slit confocal system configured for automated focus detectio...
Patent number
11,356,594
Issue date
Jun 7, 2022
KLA Corporation
Brooke Bruguier
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Correlating SEM and optical images for wafer noise nuisance identif...
Patent number
10,921,262
Issue date
Feb 16, 2021
KLA-Tencor Corporation
Qiang Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Arbitrary wavefront compensator for deep ultraviolet (DUV) optical...
Patent number
10,761,031
Issue date
Sep 1, 2020
KLA-Tencor Corporation
Qiang Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Correlating SEM and optical images for wafer noise nuisance identif...
Patent number
10,697,900
Issue date
Jun 30, 2020
KLA-Tencor Corporation
Qiang Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Phase contrast monitoring for extreme ultra-violet (EUV) masks defe...
Patent number
10,634,623
Issue date
Apr 28, 2020
KLA-Tencor Corporation
Qiang Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for apodization in a semiconductor device inspect...
Patent number
9,645,093
Issue date
May 9, 2017
KLA-Tencor Corporation
Jamie M. Sullivan
G02 - OPTICS
Information
Patent Grant
Wave front aberration metrology of optics of EUV mask inspection sy...
Patent number
9,335,206
Issue date
May 10, 2016
KLA-Tencor Corporation
Qiang Zhang
G01 - MEASURING TESTING
Information
Patent Grant
System and method for apodization in a semiconductor device inspect...
Patent number
9,176,069
Issue date
Nov 3, 2015
KLA-Tencor Corporation
Jamie M. Sullivan
G01 - MEASURING TESTING
Information
Patent Grant
Continuous generation of extreme ultraviolet light
Patent number
8,963,110
Issue date
Feb 24, 2015
KLA-Tencor Corporation
Layton Hale
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Detecting defects on a wafer
Patent number
8,605,275
Issue date
Dec 10, 2013
KLA-Tencor Corp.
Lu Chen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Wave-Front Aberration Metrology of Extreme Ultraviolet Mask Inspect...
Publication number
20200379336
Publication date
Dec 3, 2020
KLA Corporation
Dmitriy Zusin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...
Publication number
20200292468
Publication date
Sep 17, 2020
KLA-Tencor Corporation
Qiang Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CORRELATING SEM AND OPTICAL IMAGES FOR WAFER NOISE NUISANCE IDENTIF...
Publication number
20190383753
Publication date
Dec 19, 2019
KLA-Tencor Corporation
Qiang Zhang
G01 - MEASURING TESTING
Information
Patent Application
PHASE CONTRAST MONITORING FOR EXTREME ULTRA-VIOLET (EUV) MASKS DEFE...
Publication number
20180100814
Publication date
Apr 12, 2018
KLA-Tencor Corporation
Qiang Zhang
G01 - MEASURING TESTING
Information
Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
Publication number
20160054232
Publication date
Feb 25, 2016
KLA-Tencor Corporation
Jamie M. Sullivan
G01 - MEASURING TESTING
Information
Patent Application
Continuous Generation of Extreme Ultraviolet Light
Publication number
20140374611
Publication date
Dec 25, 2014
Layton Hale
G01 - MEASURING TESTING
Information
Patent Application
CARBON AS GRAZING INCIDENCE EUV MIRROR AND SPECTRAL PURITY FILTER
Publication number
20140168758
Publication date
Jun 19, 2014
KLA-Tencor Corporation
Garry Rose
G02 - OPTICS
Information
Patent Application
WAVE FRONT ABERRATION METROLOGY OF OPTICS OF EUV MASK INSPECTION SY...
Publication number
20140063490
Publication date
Mar 6, 2014
Qiang Zhang
G02 - OPTICS
Information
Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
Publication number
20140016125
Publication date
Jan 16, 2014
KLA-Tencor Corporation
Jamie M. Sullivan
G02 - OPTICS
Information
Patent Application
Detecting Defects on a Wafer
Publication number
20120044486
Publication date
Feb 23, 2012
KLA-Tencor Corporation
Lu Chen
G01 - MEASURING TESTING