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Qiang ZHAO
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Normal-incidence in-situ process monitor sensor
Patent number
11,961,721
Issue date
Apr 16, 2024
Tokyo Electron Limited
Ching Ling Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
Patent number
11,796,390
Issue date
Oct 24, 2023
KLA Corporation
Tianhan Wang
G01 - MEASURING TESTING
Information
Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
Patent number
11,378,451
Issue date
Jul 5, 2022
KLA Corporation
Tianhan Wang
G01 - MEASURING TESTING
Information
Patent Grant
Self-aware and correcting heterogenous platform incorporating integ...
Patent number
11,101,173
Issue date
Aug 24, 2021
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Normal-incident in-situ process monitor sensor
Patent number
10,978,278
Issue date
Apr 13, 2021
Tokyo Electron Limited
Ching Ling Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aware and correcting heterogenous platform incorporating integ...
Patent number
10,916,472
Issue date
Feb 9, 2021
Tokyo Electron Limited
Robert Clark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dispersion model for band gap tracking
Patent number
10,770,362
Issue date
Sep 8, 2020
KLA Corporation
Natalia Malkova
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,732,520
Issue date
Aug 4, 2020
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Adaptive numerical aperture control method and system
Patent number
10,678,226
Issue date
Jun 9, 2020
KLA-Tencor Corporation
Qiang Wang
G01 - MEASURING TESTING
Information
Patent Grant
Automated metrology system selection
Patent number
10,502,692
Issue date
Dec 10, 2019
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Grant
Model based optical measurements of semiconductor structures with a...
Patent number
10,458,912
Issue date
Oct 29, 2019
KLA-Tencor Corporation
Houssam Chouaib
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dispersion model for band gap tracking
Patent number
10,410,935
Issue date
Sep 10, 2019
KLA-Tencor Corporation
Natalia Malkova
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method, and computer program product for automatically dete...
Patent number
10,393,647
Issue date
Aug 27, 2019
KLA-Tencor Corporation
Qiang Jimmy Zhao
G01 - MEASURING TESTING
Information
Patent Grant
Measurement library optimization in semiconductor metrology
Patent number
10,345,721
Issue date
Jul 9, 2019
KLA-Tencor Corporation
Meng Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calculated electrical performance metrics for process monitoring an...
Patent number
10,079,183
Issue date
Sep 18, 2018
KLA-Tenor Corporation
Xiang Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Model building and analysis engine for combined X-ray and optical m...
Patent number
10,013,518
Issue date
Jul 3, 2018
KLA-Tencor Corporation
Michael S. Bakeman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dispersion model for band gap tracking
Patent number
9,595,481
Issue date
Mar 14, 2017
KLA-Tencor Corporation
Natalia Malkova
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device models including re-usable sub-structures
Patent number
9,553,033
Issue date
Jan 24, 2017
KLA-Tencor Corporation
Jonathan Iloreta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement of composition for thin films
Patent number
9,442,063
Issue date
Sep 13, 2016
KLA-Tencor Corporation
Ming Di
G01 - MEASURING TESTING
Information
Patent Grant
Method for identifying self-generated spurious signals
Patent number
8,912,804
Issue date
Dec 16, 2014
LitePoint Corporation
Christian Volf Olgaard
G01 - MEASURING TESTING
Information
Patent Grant
High throughput thin film characterization and defect detection
Patent number
8,711,349
Issue date
Apr 29, 2014
KLA-Tencor Corporation
Xiang Gao
G01 - MEASURING TESTING
Information
Patent Grant
Methods for measurement or analysis of a nitrogen concentration of...
Patent number
7,349,079
Issue date
Mar 25, 2008
KLA-Tencor Technologies Corp.
Qiang Zhao
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Measurements Of Semiconductor Structures Based On Spectral Differen...
Publication number
20240186191
Publication date
Jun 6, 2024
KLA Corporation
Ming Di
G01 - MEASURING TESTING
Information
Patent Application
INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION
Publication number
20240176206
Publication date
May 30, 2024
KLA Corporation
Qiang Zhao
G02 - OPTICS
Information
Patent Application
Methods And Systems For Systematic Error Compensation Across A Flee...
Publication number
20240053280
Publication date
Feb 15, 2024
KLA Corporation
Ming Di
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
Publication number
20220349752
Publication date
Nov 3, 2022
KLA Corporation
Tianhan Wang
G01 - MEASURING TESTING
Information
Patent Application
NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR
Publication number
20210193444
Publication date
Jun 24, 2021
TOKYO ELECTRON LIMITED
Ching Ling Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
Publication number
20200083074
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Robert Clark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
Publication number
20200081423
Publication date
Mar 12, 2020
TOKYO ELECTRON LIMITED
Robert Clark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NORMAL-INCIDENT IN-SITU PROCESS MONITOR SENSOR
Publication number
20200043710
Publication date
Feb 6, 2020
TOKYO ELECTRON LIMITED
Ching Ling Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF BANDGAP ANALYSIS AND MODELING FOR HIGH K METAL GATE
Publication number
20190242938
Publication date
Aug 8, 2019
GLOBALFOUNDRIES INC.
Min DAI
G01 - MEASURING TESTING
Information
Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
Publication number
20190041266
Publication date
Feb 7, 2019
KLA-Tencor Corporation
Tianhan Wang
G01 - MEASURING TESTING
Information
Patent Application
MODEL BASED OPTICAL MEASUREMENTS OF SEMICONDUCTOR STRUCTURES WITH A...
Publication number
20180059019
Publication date
Mar 1, 2018
KLA-Tencor Corporation
Houssam Chouaib
G01 - MEASURING TESTING
Information
Patent Application
Automated Metrology System Selection
Publication number
20170023491
Publication date
Jan 26, 2017
KLA-Tencor Corporation
Meng Cao
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor Device Models Including Re-Usable Sub-Structures
Publication number
20150199463
Publication date
Jul 16, 2015
KLA-Tencor Corporation
Jonathan Iloreta
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Calculated Electrical Performance Metrics For Process Monitoring An...
Publication number
20150006097
Publication date
Jan 1, 2015
KLA-Tencor Corporation
Xiang Gao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL M...
Publication number
20140019097
Publication date
Jan 16, 2014
Michael S. Bakeman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR IDENTIFYING SELF-GENERATED SPURIOUS SIGNALS
Publication number
20130234728
Publication date
Sep 12, 2013
LITEPOINT CORPORATION
Christian Volf OLGAARD
G01 - MEASURING TESTING
Information
Patent Application
High Throughput Thin Film Characterization And Defect Detection
Publication number
20130083320
Publication date
Apr 4, 2013
KLA-Tencor Corporation
Xiang Gao
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT OF COMPOSITION FOR THIN FILMS
Publication number
20130006539
Publication date
Jan 3, 2013
KLA-Tencor Corporation
Ming Di
G01 - MEASURING TESTING
Information
Patent Application
Methods for measurement or analysis of a nitrogen concentration of...
Publication number
20050254049
Publication date
Nov 17, 2005
Qiang Zhao
G01 - MEASURING TESTING