Qiang ZHAO

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Normal-incidence in-situ process monitor sensor
- Patent number 11,961,721
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Ching Ling Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
- Patent number 11,796,390
- Issue date Oct 24, 2023
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Grant
Bandgap measurements of patterned film stacks using spectroscopic m...
- Patent number 11,378,451
- Issue date Jul 5, 2022
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Grant
Self-aware and correcting heterogenous platform incorporating integ...
- Patent number 11,101,173
- Issue date Aug 24, 2021
- Tokyo Electron Limited
- Robert Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Normal-incident in-situ process monitor sensor
- Patent number 10,978,278
- Issue date Apr 13, 2021
- Tokyo Electron Limited
- Ching Ling Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aware and correcting heterogenous platform incorporating integ...
- Patent number 10,916,472
- Issue date Feb 9, 2021
- Tokyo Electron Limited
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 10,770,362
- Issue date Sep 8, 2020
- KLA Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement library optimization in semiconductor metrology
- Patent number 10,732,520
- Issue date Aug 4, 2020
- KLA-Tencor Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adaptive numerical aperture control method and system
- Patent number 10,678,226
- Issue date Jun 9, 2020
- KLA-Tencor Corporation
- Qiang Wang
- G01 - MEASURING TESTING
Information Patent Grant
Automated metrology system selection
- Patent number 10,502,692
- Issue date Dec 10, 2019
- KLA-Tencor Corporation
- Meng Cao
- G01 - MEASURING TESTING
Information Patent Grant
Model based optical measurements of semiconductor structures with a...
- Patent number 10,458,912
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Houssam Chouaib
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 10,410,935
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method, and computer program product for automatically dete...
- Patent number 10,393,647
- Issue date Aug 27, 2019
- KLA-Tencor Corporation
- Qiang Jimmy Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Measurement library optimization in semiconductor metrology
- Patent number 10,345,721
- Issue date Jul 9, 2019
- KLA-Tencor Corporation
- Meng Cao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calculated electrical performance metrics for process monitoring an...
- Patent number 10,079,183
- Issue date Sep 18, 2018
- KLA-Tenor Corporation
- Xiang Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Model building and analysis engine for combined X-ray and optical m...
- Patent number 10,013,518
- Issue date Jul 3, 2018
- KLA-Tencor Corporation
- Michael S. Bakeman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dispersion model for band gap tracking
- Patent number 9,595,481
- Issue date Mar 14, 2017
- KLA-Tencor Corporation
- Natalia Malkova
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device models including re-usable sub-structures
- Patent number 9,553,033
- Issue date Jan 24, 2017
- KLA-Tencor Corporation
- Jonathan Iloreta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of composition for thin films
- Patent number 9,442,063
- Issue date Sep 13, 2016
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Grant
Method for identifying self-generated spurious signals
- Patent number 8,912,804
- Issue date Dec 16, 2014
- LitePoint Corporation
- Christian Volf Olgaard
- G01 - MEASURING TESTING
Information Patent Grant
High throughput thin film characterization and defect detection
- Patent number 8,711,349
- Issue date Apr 29, 2014
- KLA-Tencor Corporation
- Xiang Gao
- G01 - MEASURING TESTING
Information Patent Grant
Methods for measurement or analysis of a nitrogen concentration of...
- Patent number 7,349,079
- Issue date Mar 25, 2008
- KLA-Tencor Technologies Corp.
- Qiang Zhao
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Nanoscale Imaging Based On Second Harmonic...
- Publication number 20240353352
- Publication date Oct 24, 2024
- KLA Corporation
- Qiang Zhao
- G01 - MEASURING TESTING
Information Patent Application
INTERFACE-BASED DEFECT INSPECTION USING SECOND HARMONIC GENERATION
- Publication number 20240221149
- Publication date Jul 4, 2024
- KLA Corporation
- Qiang Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Measurements Of Semiconductor Structures Based On Spectral Differen...
- Publication number 20240186191
- Publication date Jun 6, 2024
- KLA Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Application
INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION
- Publication number 20240176206
- Publication date May 30, 2024
- KLA Corporation
- Qiang Zhao
- G02 - OPTICS
Information Patent Application
Methods And Systems For Systematic Error Compensation Across A Flee...
- Publication number 20240053280
- Publication date Feb 15, 2024
- KLA Corporation
- Ming Di
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
- Publication number 20220349752
- Publication date Nov 3, 2022
- KLA Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Application
NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR
- Publication number 20210193444
- Publication date Jun 24, 2021
- TOKYO ELECTRON LIMITED
- Ching Ling Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
- Publication number 20200083074
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...
- Publication number 20200081423
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Robert Clark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NORMAL-INCIDENT IN-SITU PROCESS MONITOR SENSOR
- Publication number 20200043710
- Publication date Feb 6, 2020
- TOKYO ELECTRON LIMITED
- Ching Ling Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF BANDGAP ANALYSIS AND MODELING FOR HIGH K METAL GATE
- Publication number 20190242938
- Publication date Aug 8, 2019
- GLOBALFOUNDRIES INC.
- Min DAI
- G01 - MEASURING TESTING
Information Patent Application
Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...
- Publication number 20190041266
- Publication date Feb 7, 2019
- KLA-Tencor Corporation
- Tianhan Wang
- G01 - MEASURING TESTING
Information Patent Application
MODEL BASED OPTICAL MEASUREMENTS OF SEMICONDUCTOR STRUCTURES WITH A...
- Publication number 20180059019
- Publication date Mar 1, 2018
- KLA-Tencor Corporation
- Houssam Chouaib
- G01 - MEASURING TESTING
Information Patent Application
Automated Metrology System Selection
- Publication number 20170023491
- Publication date Jan 26, 2017
- KLA-Tencor Corporation
- Meng Cao
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor Device Models Including Re-Usable Sub-Structures
- Publication number 20150199463
- Publication date Jul 16, 2015
- KLA-Tencor Corporation
- Jonathan Iloreta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Calculated Electrical Performance Metrics For Process Monitoring An...
- Publication number 20150006097
- Publication date Jan 1, 2015
- KLA-Tencor Corporation
- Xiang Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL M...
- Publication number 20140019097
- Publication date Jan 16, 2014
- Michael S. Bakeman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR IDENTIFYING SELF-GENERATED SPURIOUS SIGNALS
- Publication number 20130234728
- Publication date Sep 12, 2013
- LITEPOINT CORPORATION
- Christian Volf OLGAARD
- G01 - MEASURING TESTING
Information Patent Application
High Throughput Thin Film Characterization And Defect Detection
- Publication number 20130083320
- Publication date Apr 4, 2013
- KLA-Tencor Corporation
- Xiang Gao
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT OF COMPOSITION FOR THIN FILMS
- Publication number 20130006539
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ming Di
- G01 - MEASURING TESTING
Information Patent Application
Methods for measurement or analysis of a nitrogen concentration of...
- Publication number 20050254049
- Publication date Nov 17, 2005
- Qiang Zhao
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Normal-incidence in-situ process monitor sensor

Bandgap measurements of patterned film stacks using spectroscopic m...

Bandgap measurements of patterned film stacks using spectroscopic m...

Self-aware and correcting heterogenous platform incorporating integ...

Normal-incident in-situ process monitor sensor

Self-aware and correcting heterogenous platform incorporating integ...

Dispersion model for band gap tracking

Measurement library optimization in semiconductor metrology

Adaptive numerical aperture control method and system

Automated metrology system selection

Model based optical measurements of semiconductor structures with a...

Dispersion model for band gap tracking

System, method, and computer program product for automatically dete...

Measurement library optimization in semiconductor metrology

Calculated electrical performance metrics for process monitoring an...

Model building and analysis engine for combined X-ray and optical m...

Dispersion model for band gap tracking

Semiconductor device models including re-usable sub-structures

Measurement of composition for thin films

Method for identifying self-generated spurious signals

High throughput thin film characterization and defect detection

Methods for measurement or analysis of a nitrogen concentration of...

Patents Applicationslast 30 patents

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

Methods And Systems For Nanoscale Imaging Based On Second Harmonic...

INTERFACE-BASED DEFECT INSPECTION USING SECOND HARMONIC GENERATION

Measurements Of Semiconductor Structures Based On Spectral Differen...

INTERFACE-BASED THIN FILM METROLOGY USING SECOND HARMONIC GENERATION

Methods And Systems For Systematic Error Compensation Across A Flee...

Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...

NORMAL-INCIDENCE IN-SITU PROCESS MONITOR SENSOR

SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...

SELF-AWARE AND CORRECTING HETEROGENOUS PLATFORM INCORPORATING INTEG...

NORMAL-INCIDENT IN-SITU PROCESS MONITOR SENSOR

METHODS OF BANDGAP ANALYSIS AND MODELING FOR HIGH K METAL GATE

Bandgap Measurements of Patterned Film Stacks Using Spectroscopic M...

MODEL BASED OPTICAL MEASUREMENTS OF SEMICONDUCTOR STRUCTURES WITH A...

Automated Metrology System Selection

Semiconductor Device Models Including Re-Usable Sub-Structures

Calculated Electrical Performance Metrics For Process Monitoring An...

MODEL BUILDING AND ANALYSIS ENGINE FOR COMBINED X-RAY AND OPTICAL M...

METHOD FOR IDENTIFYING SELF-GENERATED SPURIOUS SIGNALS

High Throughput Thin Film Characterization And Defect Detection

MEASUREMENT OF COMPOSITION FOR THIN FILMS

Methods for measurement or analysis of a nitrogen concentration of...