Qiaoli Song

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Inductively coupled coil and inductively coupled plasma device usin...
- Patent number 10,147,586
- Issue date Dec 4, 2018
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qiaoli Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively coupled coil and inductively coupled plasma device usin...
- Patent number 9,552,965
- Issue date Jan 24, 2017
- Beijing NMC Co., Ltd.
- Qiaoli Song
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INDUCTIVELY COUPLED COIL AND INDUCTIVELY COUPLED PLASMA DEVICE USIN...
- Publication number 20170092466
- Publication date Mar 30, 2017
- Beijing NMC Co., Ltd.
- Qiaoli SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUCTIVELY COUPLED COIL AND INDUCTIVELY COUPLED PLASMA DEVICE USIN...
- Publication number 20090314434
- Publication date Dec 24, 2009
- Qiaoli Song
- H01 - BASIC ELECTRIC ELEMENTS