Qiaowei Lou

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Albany, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet lithography patterning method
- Patent number 11,915,931
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Choong-man Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for dry etching silicon carbide films for resist underlayer...
- Patent number 11,658,038
- Issue date May 23, 2023
- Tokyo Electron Limited
- Angelique Raley
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY PATTERNING METHOD
- Publication number 20240153773
- Publication date May 9, 2024
- TOKYO ELECTRONIC LIMITED
- Choong-Man Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Ultraviolet Lithography Patterning Method
- Publication number 20230054125
- Publication date Feb 23, 2023
- TOKYO ELECTRON LIMITED
- Choong-man Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Pre-Treatment Method To Improve Etch Selectivity And Defecti...
- Publication number 20220037152
- Publication date Feb 3, 2022
- TOKYO ELECTRON LIMITED
- Angelique Raley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DRY ETCHING SILICON CARBIDE FILMS FOR RESIST UNDERLAYER...
- Publication number 20210358763
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Angelique Raley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Structure for Smoothing Substrate Patterns or Surfaces
- Publication number 20210020448
- Publication date Jan 21, 2021
- TOKYO ELECTRON LIMITED
- Qiaowei Lou
- H01 - BASIC ELECTRIC ELEMENTS