Qibiao Chen

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Lens array-based illumination for wafer inspection
- Patent number 9,625,726
- Issue date Apr 18, 2017
- KLA-Tencor Corp.
- Qibiao Chen
- G02 - OPTICS
Information Patent Grant
Super resolution inspection system
- Patent number 9,128,064
- Issue date Sep 8, 2015
- KLA-Tencor Corporation
- Daniel L. Cavan
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for providing illumination of a specimen for a...
- Patent number 7,705,331
- Issue date Apr 27, 2010
- KLA-Tencor Technologies Corp.
- Greg Kirk
- G01 - MEASURING TESTING
Information Patent Grant
System and method for illuminating a specimen with uniform angular...
- Patent number 7,654,715
- Issue date Feb 2, 2010
- KLA-Tencor Technologies Corporation
- Qibiao Chen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Lens Array-Based Illumination for Wafer Inspection
- Publication number 20160161749
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Qibiao Chen
- G02 - OPTICS
Information Patent Application
SUPER RESOLUTION INSPECTION SYSTEM
- Publication number 20130321797
- Publication date Dec 5, 2013
- KLA-Tencor Corporation
- Daniel L. Cavan
- G01 - MEASURING TESTING