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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods and systems for advanced ion control for etching processes
Patent number
11,049,726
Issue date
Jun 29, 2021
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for advanced ion control for etching processes
Patent number
10,943,789
Issue date
Mar 9, 2021
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon-based deposition for semiconductor processing
Patent number
10,658,194
Issue date
May 19, 2020
Lam Research Corporation
Zhongkui Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Near-substrate supplemental plasma density generation with low bias...
Patent number
10,242,845
Issue date
Mar 26, 2019
Lam Research Corporation
Zhongkui Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and systems for plasma etching using bi-modal process gas c...
Patent number
10,177,003
Issue date
Jan 8, 2019
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon oxide silicon nitride stack ion-assisted etch
Patent number
9,997,366
Issue date
Jun 12, 2018
Lam Research Corporation
Zhongkui Tan
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Atomic layer etching in continuous plasma
Patent number
9,991,128
Issue date
Jun 5, 2018
Lam Research Corporation
Zhongkui Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for detecting endpoint for through-silicon via reveal appli...
Patent number
9,941,178
Issue date
Apr 10, 2018
Lam Research Corporation
Alan Jeffrey Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line edge roughness improvement with photon-assisted plasma process
Patent number
9,859,127
Issue date
Jan 2, 2018
Lam Research Corporation
Zhongkui Tan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Line edge roughness improvement with sidewall sputtering
Patent number
9,852,924
Issue date
Dec 26, 2017
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for advanced ion control for etching processes
Patent number
9,824,896
Issue date
Nov 21, 2017
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for independent control of radical density, ion...
Patent number
9,767,991
Issue date
Sep 19, 2017
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for plasma etching using bi-modal process gas c...
Patent number
9,691,625
Issue date
Jun 27, 2017
Lam Research Corporation
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for detecting endpoint for through-silicon via...
Patent number
9,543,225
Issue date
Jan 10, 2017
Lam Research Corporation
Alan Jeffrey Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for achieving smooth side walls after Bosch etch process
Patent number
8,871,105
Issue date
Oct 28, 2014
Lam Research Corporation
Jaroslaw W. Winniczek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlled gas mixing for smooth sidewall rapid alternating etch pr...
Patent number
8,691,698
Issue date
Apr 8, 2014
Lam Research Corporation
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for providing high etch rate
Patent number
8,609,548
Issue date
Dec 17, 2013
Lam Research Corporation
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Use of spectrum to synchronize RF switching with gas switching duri...
Patent number
8,440,473
Issue date
May 14, 2013
Lam Research Corporation
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTROL OF MASK CD
Publication number
20230230807
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Beibei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
Publication number
20220301853
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Wenchi LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and Systems for Advanced Ion Control for Etching Processes
Publication number
20210193474
Publication date
Jun 24, 2021
LAM RESEARCH CORPORATION
Zhongkui Tan
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Near-Substrate Supplemental Plasma Density Generation with Low Bias...
Publication number
20180204708
Publication date
Jul 19, 2018
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON OXIDE SILICON NITRIDE STACK ION-ASSISTED ETCH
Publication number
20180108532
Publication date
Apr 19, 2018
LAM RESEARCH CORPORATION
Zhongkui TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Advanced Ion Control for Etching Processes
Publication number
20180090334
Publication date
Mar 29, 2018
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Advanced Ion Control for Etching Processes
Publication number
20180076045
Publication date
Mar 15, 2018
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON-BASED DEPOSITION FOR SEMICONDUCTOR PROCESSING
Publication number
20180061659
Publication date
Mar 1, 2018
LAM RESEARCH CORPORATION
Zhongkui TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Independent Control of Radical Density, Ion...
Publication number
20180005803
Publication date
Jan 4, 2018
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE EDGE ROUGHNESS IMPROVEMENT WITH PHOTON-ASSISTED PLASMA PROCESS
Publication number
20170358456
Publication date
Dec 14, 2017
LAM RESEARCH CORPORATION
Zhongkui TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Plasma Etching Using Bi-Modal Process Gas C...
Publication number
20170271166
Publication date
Sep 21, 2017
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA
Publication number
20170229311
Publication date
Aug 10, 2017
LAM RESEARCH CORPORATION
Zhongkui Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and Systems for Advanced Ion Control for Etching Processes
Publication number
20170125260
Publication date
May 4, 2017
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Independent Control of Radical Density, Ion...
Publication number
20170125216
Publication date
May 4, 2017
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Plasma Etching Using Bi-Modal Process Gas C...
Publication number
20170125253
Publication date
May 4, 2017
LAM RESEARCH CORPORATION
Zhongkui Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Detecting Endpoint for Through-Silicon Via Reveal Appli...
Publication number
20170062290
Publication date
Mar 2, 2017
LAM RESEARCH CORPORATION
Alan Jeffrey Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DETECTING ENDPOINT FOR THROUGH-SILICON VIA...
Publication number
20150311129
Publication date
Oct 29, 2015
LAM RESEARCH CORPORATION
Alan Jeffrey Miller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ACHIEVING SMOOTH SIDE WALLS AFTER BOSCH ETCH PROCESS
Publication number
20130237062
Publication date
Sep 12, 2013
Jaroslaw W. Winniczek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROLLED GAS MIXING FOR SMOOTH SIDEWALL RAPID ALTERNATING ETCH PR...
Publication number
20130203256
Publication date
Aug 8, 2013
LAM RESEARCH CORPORATION
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROVIDING HIGH ETCH RATE
Publication number
20120309194
Publication date
Dec 6, 2012
LAM RESEARCH CORPORATION
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF SPECTRUM TO SYNCHRONIZE RF SWITCHING WITH GAS SWITCHING DURI...
Publication number
20120309198
Publication date
Dec 6, 2012
LAM RESEARCH CORPORATION
Qing Xu
H01 - BASIC ELECTRIC ELEMENTS