Qingfu Tang

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Port Jefferson, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Multi-wafer rotating disc reactor with inertial planetary drive
- Patent number 9,230,846
- Issue date Jan 5, 2016
- Veeco Instruments, Inc.
- Adrian Celaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE
- Publication number 20160118291
- Publication date Apr 28, 2016
- VEECO INSTRUMENTS, INC.
- Adrian Celaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...