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last 30 patents
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Patent Grant
Silicon nitride phased array chip based on a suspended waveguide st...
Patent number
11,598,917
Issue date
Mar 7, 2023
CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
Heping Zeng
G02 - OPTICS
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last 30 patents
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Patent Application
SILICON NITRIDE PHASED ARRAY CHIP BASED ON A SUSPENDED WAVEGUIDE ST...
Publication number
20210294032
Publication date
Sep 23, 2021
Chongqing Institute of East China Normal University
Heping ZENG
G02 - OPTICS