Qinghong K. Gao

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Multiple zone gas distribution apparatus for thermal control of sem...
- Patent number 7,156,951
- Issue date Jan 2, 2007
- Lam Research Corporation
- Qinghong K. Gao
- H01 - BASIC ELECTRIC ELEMENTS