Qinghua Zhao

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Seam removal in high aspect ratio gap-fill
- Patent number 12,142,480
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...
- Publication number 20250230541
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL
- Publication number 20250037996
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF PULSING ASSISTED TUNGSTEN-CONTAINING FILM DEPOSITION
- Publication number 20240332003
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Qinghua Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...
- Publication number 20240035195
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Qinghua ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...
- Publication number 20230340661
- Publication date Oct 26, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRICAL IMPROVEMENTS FOR 3D NAND
- Publication number 20230309300
- Publication date Sep 28, 2023
- Applied Materials, Inc.
- Dimitrios Pavlopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL
- Publication number 20230050255
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAM-FREE GAPFILL DEPOSITION
- Publication number 20230051200
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Qinghua Zhao
- H01 - BASIC ELECTRIC ELEMENTS

Qinghua Zhao

Person

Patents Grantslast 30 patents

Seam removal in high aspect ratio gap-fill

Patents Applicationslast 30 patents

Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...

SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL

RF PULSING ASSISTED TUNGSTEN-CONTAINING FILM DEPOSITION

METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...

Gapfill Process Using Pulsed High-Frequency Radio-Frequency (HFRF)...

ELECTRICAL IMPROVEMENTS FOR 3D NAND

SEAM REMOVAL IN HIGH ASPECT RATIO GAP-FILL

SEAM-FREE GAPFILL DEPOSITION