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last 30 patents
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Patent Grant
Method to reduce trench cone formation in the fabrication of shallo...
Patent number
6,281,093
Issue date
Aug 28, 2001
Chartered Semiconductor Manufacturing Ltd.
Yelehanka Ramachandramurthy Pradeep
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to protect chamber wall from etching by endpoint plasma clean
Patent number
6,124,927
Issue date
Sep 26, 2000
Chartered Semiconductor Manufacturing Ltd.
Qinghua Zhong
G01 - MEASURING TESTING
Information
Patent Grant
Method for making improved shallow trench isolation for semiconduct...
Patent number
6,001,706
Issue date
Dec 14, 1999
Chartered Semiconductor Manufacturing, Ltd.
Poh Suan Tan
H01 - BASIC ELECTRIC ELEMENTS